Multilayer film sputtering device 'S600'
Equipped with a heater stage (1000℃)! Usable for various applications from development to mass production processes.
The S600 is a multilayer sputtering device that contributes to the enhancement of electronic component quality and productivity through improvements in multilayer and laminated film deposition processes. By achieving high-quality and high-precision film deposition, it enhances device quality. It increases cost competitiveness through high throughput, improved production yield, and optimized material utilization efficiency. With options that accommodate a variety of film deposition conditions, it is capable of supporting small-batch production and flexible production planning. 【Features】 ■ Supports diverse processes and high productivity with up to 5 cathodes ■ Maintains long-term uniformity of film thickness through T/S distance adjustment ■ Improves sputtered thin film characteristics with unique plasma control (MP sputtering) technology ■ Capable of high-temperature processes with a heater stage (1000°C) ■ Usable for various applications from development processes to mass production *For more details, please refer to the PDF document or feel free to contact us.
- Company：パナソニック プロダクションエンジニアリング
- Price：Other
